The motivation of this project is to design, analyse and compare the force characterization of a 3-Phase Rotary Electromagnetic Actuator Drive for a fine motion stage. The project is undertaken in order to envisage a practical and simple electromagnetic actuator that produces high precision motion and sufficient force for a micromachining fine motion stage. Actuator is a systems that converts electrical energy to mechanical energy. With advance technologies, an efficient and reliable actuator can be built for various microsystems.
The rotary motion of electromagnetic actuators is designed and analyzed using Finite Element Method (FEM) analysis. This project discussed the comparisons and detailed thrust force analysis of the simulations and fabricated actuators.